Defect structures in (001) zincblende GaN/3C-SiC nucleation layers

نویسندگان

چکیده

The defect structure of zincblende GaN nucleation layers grown by metalorganic vapor-phase epitaxy on 3C-SiC/Si (001) was investigated high-resolution scanning transmission electron microscopy. Perfect dislocations, partial and stacking faults are present in the layers. dislocations identified as 60° mixed-type act misfit to relieve compressive lattice mismatch strain GaN. Stacking mainly bounded 30° Shockley rarely Lomer–Cottrell both which able layer. We propose that their originate from dissociation perfect layer direct loops surface. These two main mechanisms lead final

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ژورنال

عنوان ژورنال: Journal of Applied Physics

سال: 2021

ISSN: ['1089-7550', '0021-8979', '1520-8850']

DOI: https://doi.org/10.1063/5.0036366